Technical Features
For diffractive optical waveguides and DOE diffraction gratings, enabling large-area, high-fidelity, and high-efficiency replication.
Functional Parameters
- Support automatic demolding; demolding speed and force are configurable via software
- Gluing Mode: Support patterned gluing for sub-molds, compatible with flexible sub-mold fabrication and one-click automatic sub-mold renewal
- Imprinting Platform: Multi-channel micro-porous adsorption tray with independently configurable vacuum zones; support tray temperature control and heating, with temperature uniformity better than ±4%. Active cooling system is optional
- Alignment Imprinting (Optional): X-Y-θ-Z stage + high-precision CCD optical visual alignment
- Imprinting Mode: Roll-to-flat UV curing imprinting with flexible transparent mold; support tray heating up to 100°C
- Imprint Uniformity: Better than ±5% within 500 mm; sidewall angle > 85°
- Imprint Residual Layer: Imprinted structure 50 nm–2 μm; residual layer thickness < 20 nm
- Light Source: Linear light source exposure, 365 nm LED, optical power density
- 2000 mW/cm?, power uniformity > 90%
- Gluing Method: Spin coating / anilox coating / spray coating optional
- Substrate Size: 500×500 mm square glass
- Software Interface: 15-inch color touch screen
- Cleanliness Level: Class 10(external environment Class 100)
- Dimensions: 2160 mm (L) × 2060 mm (W) × 2460 mm (H)
- Environmental Requirements: Ambient temperature 15–25 °C, humidity ≤ 70%
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